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  1. PECVD and CVD carbon nanotube growth systems, CNT growth tools for aligned MWCNT and SWCNT growth at CMOS compatible temperatures

    carbon nanotube equipment and nanowire deposition systems for low temperature, CVD, PECVD and ICP growth of nanotubes, nanowires, DLC, PECVD silicon thin films, ...
    PVD1
    CVD1
    vacuum systems1
    PECVD1
    UHV1
    vacuum furnace1
    thin film coating1
    wafer fabrication1
    nanostructure1
    semiconductor fabrication1
    plasma source1
    sputtering systems1
    vapor deposition1
    plasma etching1
    ion assisted deposition1
    MEMS fabrication1
    sputtering equipment1
    NanoSoft1
    vacuum engineering1
    glow discharge cleaning1
    vapour deposition1
    carbon nanotube growth1
    GammaSoft1
    GMR fabrication1
    nano material growth1
    sputtering tools1
    sputter system1
    thin film deposition tools1
    carbon nanotube tool0
    Gamma10000
    Nanogrowth0

    www.surreynanosystems.com - 2009-02-10

sputtering equipment1 pvd1 pecvd1 design7 law5 etch1 semiconductor fabrication1 all3 repeat1 keywords4 cvd1 rights2 sputtering1 reserved1 sputter system1 business7 legal4 civil3 coating2 copyright2

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